HSQ 330

HSQ 330 is a high purity electrically fused quartz glass with guaranteed maximum contamination levels. Physically equivalent to HSQ 300, this is the material of choice for any application that requires proven purity.

Characteristics / Special features:

Tubes, bars, rods, blocks, plates, discs with guaranteed chemical purity

Products and applications:

Semiconductor processes with various high purity requirements from room temperature to high temperatures: CVD tubes, diffusion furnaces, epitaxy chambers, etching systems; optical applications; tubes, bars, rods, blocks, HSQ 330 P E Tubes, bars, rods, blocks, plates, discs plates, discs, flanges

Chemical purity – Guaranteed trace elements and OH content in quartz glass (ppm by weight oxide)

Trace elements

OH Content

typical

0.5

n.s.

<0.05

<0.03

0.1

0.2

0.6

0.05

<0.05

0.2

1.1

0.7

<30*

guaranteed

<25

1.0

n.s.

0.1

0.5

0.8

1.5

0.3

n.s.

<0.5

n.s.

≤40

^{*The OH content is below 30 ppm. This can be further reduced via heat treatment under the right conditions.}

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Further information

Material Grades Table Technical quartz glass information Technology competence Commitment to quality

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